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Simple, flexible scanning tool offers a 2D profile of silicon growth quality. Built for simplicity and safety in production environments, with a sophisticated data analysis package enabling research and development.
Product Overview
Measuring as-grown blocks provides the best indication of final wafer lifetime.The SBS-150 bulk-silicon lifetime analyzer is especially sensitive to lifetime variations in the growth direction of silicon ingots, giving an accurate preview of wafer quality and propagation defects.
It addition, the SBS-150 offers the only lifetime scan with a lifetime measurement range of several orders of magnitude – a feature that is typical of Sinton Instruments true bulk lifetime characterization.
| System Capabilities Primary applications: |
 Example of lifetime map, taken at a medium resolution. Similar maps of resistivity and trap density are also standard.larger view |
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| • | Qualifying high-purity silicon with lifetimes in the 1–5 millisecond range |
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| • | Qualifying B-Cz silicon as-grown, without special surface preparation |
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| • | Characterizing lifetime, trap density and defect zones in multicrystalline blocks |
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Product features: |
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| • | Proximity sensor scan in the X-Y plane |
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| • | True bulk lifetime characterization using broadband IR excitation |
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| • | Ergonomic loading and unloading tray |
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| • | Easy-to-use, intuitive operator controls |
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| • | Industry-compliant interlocks and enclosure ensure operator safety |
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| • | Configurable for top-loading |
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Further Information |
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